Construcción de un microscopio perfilométrico por interferometría de luz blanca

Juan A.  Sanchez Daza; Martha Lucía  Molina Prado; Néstor. A.  Arias Hernández

doi:10.24054/rcta.v2i36.12

Authors

Juan A. Sanchez Daza Universidad de Pamplona
Martha Lucía Molina Prado Universidad de Pamplona
Néstor. A. Arias Hernández Universidad de Pamplona

DOI:

https://doi.org/10.24054/rcta.v2i36.12

Keywords:

White light interferometry, Mirau, vertical interferometer system

Abstract

Design and construction of a perfilometric microscope by white light interferometry is presented. This perfilometric microscope allows the topographic lifting of objects with nanometric resolution. By means of an axial scanning of the object, a set of images isacquired. The set of images they are obtained using a system of deformed interferometric fringes, which give information of the roughness of the object. The principle of the system it is based on the location of the coherence peak in each position Im(i,j)of the set of m images, where the position z(m)of the coherence peak changes according to the topography of the object. As results, a series of three-dimensional reconstructions of several objects at nanometric resolution is presented, obtained automatically with the help of a graphical interface elaborated in Matlab, which allow images digital processing and control of the devices.

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